Scrubber Cleaning (Semiconductor & Display)


  

Cleaning Technology for Semiconductor & Display factory Scrubbers

​Technology for removing scale attached to a scrubber in a semiconductor display process

In semiconductor and display production, hazardous substances are emitted from various production processes, and these are removed using wet scrubbers and electrostatic precipitators. Various gases and particulates used in semiconductor manufacturing are removed by the scrubber, but insoluble particulates  accumulate in the scrubber device, and periodic cleaning is required for maintenance. However, if the inside of the sealed scrubber device is entered and cleaned, a safety and environmental issue arises, and if auxiliary materials are removed and cleaned, excessive costs and damage to the auxiliary materials occur.

To address this, the performance of the scrubber must be maintained by a CIP (Cleaning In Place) method that allows cleaning without entering or disassembling the device using an eco-friendly detergent.

Cham Clean provides precision chemicals that effectively remove solid substances attached to scrubbers.

 

 

When the scrubber in the semiconductor display process is not operating properly, white smoke is emitted into the atmosphere.
​In order to operate the wet scrubber and WEPS normally, the scale attached to the scrubber must be cleaned periodically.
Cham Clean provides CIP Cleaning Chemicals that easily clean the deposits that are solidified and attached to the scrubber.

Hybrid Scrubber 

 

Tri packed wet scrubber

WEPS (Electrostatic Precipitator

 

   

Before and after results of dissolution and dispersion detergent

 

         

 

Scale atomized by Cham Clean’s

Dispersant

Solid scale attached to the solidified scrubber device

Solids dissolved and ultra-fine scale (discharged after circulation washing)

 

Removal Technology of Deposits of Horizontal Wet Scrubber for Removal of Ammonia in Semiconductor Display Process
​Bio-Film accumulated on wet scrubber must be cleaned periodically.
Cham Clean provides CIP Cleaning Chemical that easily cleans Bio-Film solidified and attached to scrubber.

 

Bio-Film Cleaning of wet Scrubber